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SENTECH CO LTD icp-rie tool si 500
Icp Rie Tool Si 500, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/icp+rie+si+500/pmc10995905-49-28-32
Average 90 stars, based on 1 article reviews
icp-rie tool si 500 - by Bioz Stars, 2026-09
90/100 stars

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Article Title: Ultradurable Embedded Physically Unclonable Functions
Article Snippet: The etching was performed using a mixture of the following gases: 20 sccm SF 6 , 80 sccm CHF 3 , and 20 sccm O 2 in an ICP-RIE tool (SI 500, SENTECH).



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